When I came to the office of the Shanghai Microelectronics Division, there were already more than a dozen people waiting there. They were from the Institute of Optoelectronics, the Institute of Electrical Engineering, and the Changguang Institute of the Chinese Academy of Sciences. Today's academician team is composed of The captain led the team himself.

"Mr. Meng, the evaluation work on the development of the next-generation lithography machine has ended."

"Thank you for your hard work, I don't know the conclusion?"

"Mr. Meng is right. The research and development value and difficulty of the next-generation lithography machine are no less than that of an aircraft carrier."

Meng Qian nodded involuntarily, "As the entire lithography machine project progresses, there are more and more problems, and the difficulty of developing the next-generation lithography machine is also refreshing our cognition time and time again.

As far as we know, a group of top global companies, including Zeiss and Cymer, have also encountered difficulties. Zeiss has given up its research and development direction for three consecutive years and is preparing to make adjustments. The research and development of the next-generation lithography machine is destined to be a fierce battle.

What has not changed is that the core technology of the next-generation lithography machine is still the light source, lens and precision instruments, but this time we need the world's top related technologies. "

Dean Lu put a document in front of Meng Qian, showing a kind smile, "Mr. Meng, take a look, this is our draft."

This draft is a modification based on the draft submitted by Gale Group. The content of the draft submitted by Dafeng Group is that the lithography machine is the core project, which will accelerate the formal approval of the Hangzhou National Laboratory for Information Physics. As the axis, pull a large-scale technological development.

As I said before, the national laboratory is of great significance. Although Meng Qian showed the company's future laboratory to the leaders before, and although the goal is directly aimed at the fourth industrial revolution, the vision is still bigger than the reality. The national laboratory needs some real A large project that exists objectively and can be approved.

So Meng Qian found such a project, which is the next-generation lithography machine.

The lithography machine project is very suitable for the above appetite, because it has three major characteristics, and the difficulty of the project has reached the top level in the world. The development of lithography machines can stimulate the development of many important disciplines such as material science and precision machinery. More important chip development has key value.

And because this national laboratory relies on the private enterprise Dafeng Group, the aircraft carrier stimulates the scientific and technological development of state-owned enterprises to a greater extent, and the Hangzhou National Laboratory of Information Physics can just stimulate the technological development of private enterprises to a greater extent. At the same time, it is perfect.

From the draft submitted by Dafeng Group, it can be seen that regarding the manufacture of lithography machines, Dafeng Group has convened more than 80 experts in the fields of precision instruments, light sources, lenses, etc. For domestic enterprises, this project will directly affect the technological development of a number of domestic enterprises.

In addition, Dafeng Group itself is a private enterprise, and the lithography machine itself is a commercial product of Dafeng Group. It can also attract external resources to a controllable degree. For example, it is also written in the draft that Dafeng Group is looking for overseas cooperation units. , Just in Neon Country, there are more than ten top companies related to Neon Country, including Hitachi, Neon Country Yamazaki Mazak, Neon Country Jettech, and Neon Country Metrology.

Dafeng Group exchanged its own technology and market for corresponding cooperation, either pure manufacturing or technical support, providing powerful off-site assistance for the lithography machine project.

Once the lithography machine project successfully pulls up the relevant domestic technical level, it will be able to further develop technologies related to the fourth industrial revolution. Therefore, the next-generation lithography machine is the core project of the Hangzhou National Laboratory for Information Physics , with all appropriate factors.

In the revised draft, it is mainly to clarify the rights and obligations and the roles played by national scientific research institutions. For example, the Chinese Academy of Sciences will strongly support this project, but is the team here considered an employee of Dafeng Group? How are their salaries and responsibilities calculated?

In the end, the project system was adopted. The National Laboratory of Information Physics in Hangzhou issued a project, and then took the project to the national scientific research institution to invite a team. Finally, the team was selected according to the project. The Chinese Academy of Sciences will pay a certain salary to the national laboratory. A salary will be paid, but the person still belongs to the Chinese Academy of Sciences.

Then there is the confidentiality work. After all, it is a national laboratory, and the requirements for confidentiality work are extremely high, especially the Dafeng Group is a private company, and it has to cooperate with foreign companies, so the requirements for confidentiality work are even higher. This kind of restriction, but there is no way, Meng Qian can also understand.

As for the technical output of the national laboratory, as a commercial product, the commercial profit of the product belongs to the Dafeng Group, but the project technology is naturally shared by the Dafeng Group and the country.

After carefully reading the draft, Meng Qian didn't have any big opinions and basically agreed with it. After all, Meng Qian didn't have any treasonous intentions at all.

There is no problem with the plan, Dean Lu began to introduce the few people brought today to Meng Qian, "These three are Hu Song, He Xiaodong, Luo Xiangang, from the Institute of Optoelectronics of our Chinese Academy of Sciences."

What Meng Qian didn't know was that these were the core technical talents who were in charge of the super-resolution lithography equipment project in his previous life. Fully self-developed lithography equipment realized under the premise of material monopoly.

This equipment breaks through key technologies such as high-uniform illumination, super-resolution lithography lens, nanoscale resolution focus detection, gap measurement and ultra-precision multi-degree-of-freedom workbench. It is the world's highest resolution UV super-resolution lithography. equipment, the single-exposure highest line width resolution reaches 22 nanometers.

The super-resolution lithography equipment project successfully broke the monopoly of foreign countries in the field of high-end lithography equipment, and provided a new solution for nano-optical processing.

Afterwards, he introduced several people from the Institute of Electrical Engineering of the Chinese Academy of Sciences. What Meng Qian also did not know was that they were the ones who successfully developed the high-speed atomic force microscope. The range can reach 50~70 microns.

As for Changguang Institute, they are all old acquaintances, and many of them are old friends who came to help develop lithography machines before.

Meng Qian shook hands with several top scientists and expressed his respect. They will all enter the lithography machine project to provide assistance for the development of the next generation of lithography machines.

"By the way, what does Meng always think about in terms of R\u0026D funding? According to our understanding, facing the financial crisis, ASML has still confirmed that it will maintain a R\u0026D funding of 1 billion euros next year." Dean Lu suddenly asked.

Meng Qian said very positively, "Regardless of whether the national laboratory can be approved or not, our investment in research and development of lithography machines next year is twice that of ASML."

"Twice? 2 billion euros?" Everyone knows that Dafeng Group is rich, but they are still a little excited. After all, one of the key factors behind Huaxia's backwardness is that it was too poor before, so Huaxia scientists are very sensitive to research and development funds.

In the 1980s and 1990s, I don’t know how many projects were dragged to death by money. If there was money, national science and technology would not be what it is today.

"If you feel that doubling is a bit small, you can also super double."

Everyone smiled with complicated expressions. Looking at everyone's expressions, Meng Qian also felt a little distressed, but Meng Qian knew that things would get better in the future. Throughout history, after 2009, it was a node when Huaxia Technology began to explode. One of the most important reasons here is that the country is rich.

Although the money came a bit late, there are actually many projects like super-resolution lithography equipment after 2009. This is also the reason why China dares to attack the industrial power, and it is also the reason why many people do not believe that the country is strong.

Because the development is too fast, whether it is the strength of the economy or the strength of technology in China, it is a bit too fast, causing some people to be unable to react at all. Because of the limitations of daily life, their cognition may still be a few years ago, but China has been turned upside down in a few years, so when they look at China with the eyes of a few years ago, they still think that this is not good and that is not good, but in fact they have made countless major breakthroughs.

This is still under the premise of various restrictions in the United States, just like the reason why we want to develop super-resolution lithography equipment instead of traditional lithography equipment, because the technology is monopolized, we have to choose a more difficult direction, but even so, we There can still be breakthroughs again and again.

In addition to money, talent and market demand are also two important internal factors for the rapid development of domestic science and technology in 2009. In the early years, there were too few places in China's market that needed high-tech products, so don't even think about selling them. There is no reason to use China's products when products from the United States and Germany are placed there. After 2009, the demand for high technology in the Chinese market began to increase, and the demand in the domestic market came, which naturally promoted the development of production equipment and materials.

Not to mention talents, money without talents is useless, and after 2009, the first batch of doctorates in the education reform that started in 2000 almost came out, and more people returned from studying abroad, and talents came.

And this is also the reason for Meng Qian's self-confidence. His self-confidence in front of Kagu Daorang is really not fake. Huaxia was able to find a breakthrough in the previous environment. What's more, Dafeng Group has helped Huaxia establish many equal advantages in the past eight years. Although there are not many core technologies leading the world, at least many technologies have been pulled to the level where we can sit at the same table and negotiate with the world.

Against such a technological background, Meng Qian firmly believes that China's technological explosion will definitely come even more violently.

After a whole day of communication, the two parties finally finalized all the details, and after returning home, the final review was carried out at the national level.

On October 31, 2008, the state officially approved the Hangzhou National Laboratory of Information Physics, the first domestic national laboratory relying on a private enterprise, to start.

Thanks for the rewards of the time has passed! Thank you Dongmeng for your reward!

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